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[New Product] Ultra High Purity Diaphragm Valve "ALD7"

Achieving high-precision supply of precursors for ALD over millions of cycles. The top model in the series contributes to improving yield in semiconductor manufacturing.

The ultra-high purity diaphragm valve "ALD7" is a valve that can supply ultra-high purity fluids, such as precursors necessary for atomic layer deposition (ALD) in semiconductor manufacturing, with high precision and stability. By reducing individual differences in each product, it ensures consistency in various performance metrics such as flow rate, actuator speed, and thermal stability, demonstrating high performance across all aspects, including between valves, precursor supply, and chambers. 【Features】 ■ Compact and high-performance. Achieves low maintenance ■ Enables accurate supply of precursors over millions of cycles ■ Realizes high-speed operation with a response time as fast as 5ms ■ Excellent heat resistance with actuators rated for 150°C and valve bodies for 200°C ■ Utilizes our proprietary "316L VIM-VAR stainless steel" for the body, achieving high corrosion resistance *For more details, please refer to the materials. Feel free to contact us with any inquiries.

• Company：スウェージロック・ジャパン
• Price：Other

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